| 000 | 00671cam a2200241Ia 4500 | ||
|---|---|---|---|
| 001 | 38655 | ||
| 003 | URCABC | ||
| 005 | 20220427195140.0 | ||
| 008 | 050527s2006 njua b 001 0 eng | ||
| 020 | _a0131472860 | ||
| 035 | _a(janium) 38605 | ||
| 035 | _a(janium)38601 | ||
| 040 |
_aURCABC _bspa |
||
| 041 | 0 | _aeng | |
| 050 | 4 |
_aTK7875 _b.L58 2006 |
|
| 100 | 1 | _aLiu, Chang, | |
| 245 | 1 | 0 |
_aFoundations of MEMS / _cChang Liu. |
| 260 |
_aUpper Saddle River, NJ _bPearson/Prentice Hall _cc2006. |
||
| 300 |
_axxii, 530 p. _bil. |
||
| 504 | _aIncluye referencias bibliográficas e índice. | ||
| 650 | 1 | 4 | _aSistemas microelectromecánicos. |
| 999 |
_c24086 _d24086 |
||