<?xml version="1.0" encoding="UTF-8"?>
<mods xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns="http://www.loc.gov/mods/v3" version="3.1" xsi:schemaLocation="http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-1.xsd">
  <titleInfo>
    <title>Handbook of semiconductor manufacturing technology</title>
  </titleInfo>
  <name type="personal">
    <namePart>Doering, Robert</namePart>
    <namePart type="date">1946-</namePart>
  </name>
  <name type="personal">
    <namePart>Nishi, Yoshio</namePart>
    <namePart type="date">1940-</namePart>
  </name>
  <typeOfResource>text</typeOfResource>
  <genre authority="marc">bibliography</genre>
  <originInfo>
    <place>
      <placeTerm type="code" authority="marccountry">nyu</placeTerm>
    </place>
    <place>
      <placeTerm type="text">New York</placeTerm>
    </place>
    <publisher>CRC Press</publisher>
    <dateIssued>c2008</dateIssued>
    <dateIssued encoding="marc">2000</dateIssued>
    <edition>2a ed.</edition>
    <issuance>monographic</issuance>
  </originInfo>
  <language>
    <languageTerm authority="iso639-2b" type="code">eng</languageTerm>
  </language>
  <physicalDescription>
    <form authority="marcform">print</form>
    <extent>1 v. (various pagings)  ill.</extent>
  </physicalDescription>
  <note type="statement of responsibility">edited by Yoshio Nishi, Robert Doering ; assistant editor, Tim Wooldrige.</note>
  <note>Incluye refrencia bibliografica e indice</note>
  <subject>
    <topic>Semiconductores</topic>
    <topic>Diseño y construcción</topic>
    <topic>Manuales</topic>
  </subject>
  <classification authority="lcc">TK7871.85 .H3335 2008</classification>
  <identifier type="isbn">1574446754</identifier>
  <identifier type="isbn">9781574446753</identifier>
  <recordInfo>
    <recordContentSource authority="marcorg">URCABC</recordContentSource>
    <recordCreationDate encoding="marc">000620</recordCreationDate>
    <recordChangeDate encoding="iso8601">20220427200849.0</recordChangeDate>
    <recordIdentifier source="URCABC">39876</recordIdentifier>
    <languageOfCataloging>
      <languageTerm authority="iso639-2b" type="code">spa</languageTerm>
    </languageOfCataloging>
  </recordInfo>
</mods>
