00814cam a22002538a 450000100060000000300070000600500170001300800410003002000150007102000180008603500190010403500180012304000160014104100080015705000270016524501320019225000110032426000340033530000340036950400450040365000580044870000280050670000260053439876URCABC20220427200849.0000620s2000 nyua bf 001 0 eng a1574446754 a9781574446753 a(janium) 39815 a(janium)39811 aURCABCbspa0 aeng 4aTK7871.85b.H3335 200810aHandbook of semiconductor manufacturing technology /cedited by Yoshio Nishi, Robert Doering ; assistant editor, Tim Wooldrige. a2a ed. aNew York bCRC Press cc2008. a1 v. (various pagings) bill. aIncluye refrencia bibliografica e indice14aSemiconductoresxDiseño y construcciónxManuales.1 aDoering, Robert,d1946-1 aNishi, Yoshio,d1940-