Handbook of semiconductor manufacturing technology / 
edited by Yoshio Nishi, Robert Doering ; assistant editor, Tim Wooldrige. 
 - 2a ed. 
 - New York   CRC Press   c2008. 
 - 1 v. (various pagings)   ill. 
<br/><br/>Incluye refrencia bibliografica e indice 
<br/><br/><label>ISBN: </label>1574446754 9781574446753 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Semiconductores--Diseño y construcción--Manuales.
<br/><br/><label>LC Class. No.: </label>TK7871.85  / .H3335 2008