00790cam a2200241Ia 450000100060000000300070000600500170001300800410003002000150007103500190008603500180010504000160012304100080013905000220014710000160016924500380018526000600022330000230028350400530030665000380035995201340039799900170053138655URCABC20220427195140.0050527s2006    njua     b    001 0 eng    a0131472860  a(janium) 38605  a(janium)38601  aURCABCbspa0 aeng 4aTK7875b.L58 20061 aLiu, Chang,10aFoundations of MEMS /cChang Liu.  aUpper Saddle River, NJ bPearson/Prentice Hall cc2006.  axxii, 530 p. bil.  aIncluye referencias bibliográficas e índice.14aSistemas microelectromecánicos.  001040708AGaURBCbURBCcGENd2015-12-01e20151201 | CompraoTK7875 L58 2006 p0082899r2022-04-27 00:00:00w2022-04-27yLIBRO  c24086d24086